Work

Process development and fabrication of application-specific microvalves

Year: 2000

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.396446

Authors: Bai Xu, James Castracane, Robert E. Geer, Yahong Yao, Bruce Altemus

Institution: University at Albany, State University of New York

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

OpenAlex ID: W2075768467

FWCI: 1.911

Cites:

Cited by: 7

Related to: 10