Flexible mirror micromachined in silicon
Year: 1995
Type: article
Source: Applied Optics
DOI: 10.1364/ao.34.002968
Authors: Gleb Vdovin, P. M. Sarro
Institution: Delft University of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2076423969