Work

Surface-selective deposition of palladium and silver films from metal-organic precursors: a novel metal-organic chemical vapor deposition redox transmetalation process

Year: 1993

Type: article

Source: Journal of the American Chemical Society

DOI: 10.1021/ja00077a092

Authors: Wenbin Lin, Timothy H. Warren, Ralph G. Nuzzo, Gregory S. Girolami

Institution: University of Illinois Urbana-Champaign

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: U.S. Department of Energy

Award: MATERIALS SCIENCE RESEARCH

OpenAlex ID: W2076998593

FWCI: 5.439

Cites:

Cited by: 99

Related to: 10