Mechanical stresses in silicon carbonitride films obtained by PECVD from hexamethyldisilazane
Work
Year: 2012
Type: article
Source: Applied Surface Science
Institution Nikolaev Institute of Inorganic Chemistry
Cites: 35
Cited by: 18
Related to: 10
FWCI: 0.137
Citation percentile (by year/subfield): 60.56
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed