Work

Micro-deformation measurement using focused ion beam moire method

Year: 2003

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.509789

Authors: Huimin Xie, Biao Li, Robert E. Geer, Bai Xu, James Castracane, Fulong Dai

Institutions: Tsinghua University, University at Albany, State University of New York

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

OpenAlex ID: W2077547654

FWCI:

Cites:

Cited by:

Related to: 10