Work

Influence of sputtering parameter on the optical and electrical properties of zinc-doped indium oxide thin films

Year: 2005

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.1924473

Authors: Han-Chang Pan, Ming-Hua Shiao, Chien-Ying Su, Chien-Nan Hsiao

Institutions: National Science and Technology Council, National Center for Instrumentation Research

Language: English

Topic: Thin-Film Transistor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2077562037

FWCI: 3.813

Cites: 20

Cited by: 54

Related to: 10