Work

A Historical View of the Role of Ion-Implantation Defects in PN Junction Formation for Devices

Year: 2000

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-610-b4.1

Author: R.B. Fair

Institution: Duke University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2077850895

FWCI:

Cites: 36

Cited by: 2

Related to: 10