Work

Silicon nitride biaxial pointing mirrors with stiffening ribs

Year: 2001

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.443096

Authors: Todd J. Kaiser, B. Jeffrey Lutzenberger, Robert A. Friholm, Phillip A. Himmer, David L. Dickensheets

Institution: Montana State University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2078402755

FWCI: 1.853

Cites: 11

Cited by: 7

Related to: 10