Conformally direct imprinted inorganic surface corrugation for light extraction enhancement of light emitting diodes
Year: 2012
Type: article
Abstract: We describe the fabrication of corrugated inorganic oxide surface via direct single step conformal nanoimprinting to achieve enhanced light extraction in light emitting diodes (LEDs). Nanoscale zinc oxide (ZnO) and indium tin oxide (ITO) corrugated layer were created on a nonplanar GaN LED surface including metal electrode using ultraviolet (UV) assisted conformal nanoimprinting and subsequent inductively coupled plasma reactive ion etching (ICP-RIE) treatment. The total output powers of the surface corrugated LEDs increased by 45.6% for the patterned sapphire substrate LED and 41.9% for the flat c-plane substrate LED without any degradation of the electrical characteristics. The role of the nanoscale corrugations on the light extraction efficiency enhancement was examined using 3-dimensional finite-difference time-domain (FDTD) analysis. It was found that light scattering by subwavelength scale surface corrugation plays important role to redirect the trapped light into radiative modes. This straightforward inorganic oxide imprint method with inherent flexibility provides an efficient way to generate nanoscale surface textures for the production of high power LEDs and optoelectronic devices.
Source: Optics Express
DOI: 10.1364/oe.20.00a713
Authors: Sarah Kim, Sang-Mook Kim, Hyeong Ho Park, Dae-Geun Choi, Jae-Woo Jung, Jun Ho Jeong, Jong-Ryul Jeong
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,270
OpenAlex ID: W2078422317