Discharge frequency dependence of particulate growth in high frequency silane plasmas
Year: 1995
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.115304
Authors: H. Kawasaki, Y. Ueda, T. Yoshioka, T. Fukuzawa, M. Shiratani, Y. Watanabe
Institution: Kyushu University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2078652852