Work

Measurement of Sub-micrometer Features Based on The Topographic Contrast Using Reflection Confocal Microscopy

Year: 2005

Type: article

Source: Journal of the Optical Society of Korea

DOI: 10.3807/josk.2005.9.1.026

Authors: SeungWoo Lee, DongKyun Kang, HongKi Yoo, TaeJoong Kim, Dae-Gab Gweon, Suk-Won Lee, Kwang-Soo Kim

Institutions: Korea Advanced Institute of Science and Technology, Samsung Electronics (South Korea)

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2078733685

FWCI:

Cites: 2

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Related to: 10