Work

The effects of plasma treatment on SiO2 aerogel film using various reactive (O2, H2, N2) and non-reactive (He, Ar) gases

Year: 2000

Type: article

Source: Thin Solid Films

DOI: 10.1016/s0040-6090(00)01295-5

Authors: Jean-Jong Kim, Hyung-Ho Park, Sang-Hoon Hyun

Institution: Yonsei University

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2079596019

FWCI: 1.036

Cites: 13

Cited by: 18

Related to: 10