Effects of ozone as an oxygen source on the properties of the Al2O3 thin films prepared by atomic layer deposition
Year: 2002
Type: article
Source: Materials Chemistry and Physics
Authors: Jaebum Kim, Kuntal Chakrabarti, Jinho Lee, Ki-Young Oh, Chongmu Lee
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2080092022