Atomic layer deposition of ZnO transparent conducting oxides
Year: 1997
Type: article
Source: Applied Surface Science
Authors: Akira Yamada, Baosheng Sang, Makoto Konagai
Institution: Tokyo Institute of Technology
Language: English
Topic: ZnO doping and properties
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2080376447