Work

Temperature compensation method for resonant microsensors based on a controlled stiffness modulation

Year: 2008

Type: article

Abstract: A strategy to compensate for frequency drifts caused by temperature changes in resonant microstructures is presented. The proposed compensation method is based on a controlled stiffness modulation of the resonator by an additional feedback loop to extract the frequency changes caused by temperature changes. The feasibility of the suggested method is verified experimentally by compensating for temperature-induced frequency fluctuations of a micromachined resonator. The developed compensation scheme requires only one additional feedback loop and is applicable to any resonant microstructure featuring excitation and detection elements.

Source: Journal of Applied Physics

DOI: 10.1063/1.2952050

Authors: Jae Hyeong Seo, Kemal Safak Demirci, Albert Byun, Stuart Truax, Oliver Brand

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

Funder: National Science Foundation

Awards: Mass-Sensitive Microsensor Platform for Liquid-Phase Environmental Sensing, Chemical Microsystem based on Vertical Integration of Sensor Array and CMOS Circuitry