Work

Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm

Year: 2000

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/s0924-4247(99)00392-1

Authors: Ok Chan Jeong, Sang Sik Yang

Institution: Ajou University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2081293496

FWCI: 3.748

Cites: 7

Cited by: 187

Related to: 10