Micromachined silicon nitride deformable mirrors for focus control
Year: 2001
Type: article
Source: Optics Letters
DOI: 10.1364/ol.26.001280
Institution: Montana State University
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2082274572
