Work

Low-Dielectric, Nanoporous Organosilicate Films Prepared via Inorganic/Organic Polymer Hybrid Templates

Year: 1999

Type: article

Source: Chemistry of Materials

DOI: 10.1021/cm990114d

Authors: Cattien V. Nguyen, Kenneth R. Carter, Craig J. Hawker, James L. Hedrick, Richard L. Jaffe, Robert D. Miller, Julius F. Remenar, Hee-Woo Rhee, Philip M. Rice, Michael F. Toney, Mikael Trollsås, Do Y. Yoon

Institutions: Ames Research Center, Seoul National University, Sogang University, IBM Research - Almaden, Eloret (United States)

Language: English

Topic: Silicone and Siloxane Chemistry

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2082437172

FWCI: 10.16

Cites: 11

Cited by: 223

Related to: 10