Work

A MEMS nanoplotter with high-density parallel dip-pen nanolithography probe arrays

Year: 2002

Type: article

Source: Nanotechnology

DOI: 10.1088/0957-4484/13/2/315

Authors: Ming Zhang, David Bullen, Sung-Wook Chung, Seunghun Hong, Kee S Ryu, Zhifang Fan, Chad A Mirkin, Chang Liu

Institutions: University of Illinois Urbana-Champaign, Northwestern University, Florida State University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Northwestern University, Defense Advanced Research Projects Agency, University of Illinois at Urbana-Champaign, Division of Materials Research, Air Force Office of Scientific Research

OpenAlex ID: W2082786309

FWCI: 15.23

Cites: 10

Cited by: 142

Related to: 10