Mass and energy resolved detection of ions and neutral sputtered species incident at the substrate during reactive magnetron sputtering of Ti in mixed Ar+N2 mixtures
Year: 1994
Type: article
DOI: 10.1116/1.578955
Authors: I. Petrov, A. Myers, J. E. Greene, J. R. Abelson
Institution: University of Illinois Urbana-Champaign
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: U.S. Department of Energy
OpenAlex ID: W2083590781