Work

A Rotary Microactuator Supported on Encapsulated Microball Bearings using an Electro-Pneumatic Thrust Balance

Year: 2009

Type: conference-paper

Source: Proceedings, IEEE micro electro mechanical systems

DOI: 10.1109/memsys.2009.4805578

Authors: M. McCarthy, C. M. Waits, M. I. Beyaz, R. Ghodssi

Institutions: University of Maryland, College Park, DEVCOM Army Research Laboratory

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2083804411

FWCI: 3.354

Cites: 7

Cited by: 11

Related to: 10