Work

Si/SiGe n-type inverted modulation doping using ion implantation

Year: 2000

Type: article

Source: Thin Solid Films

DOI: 10.1016/s0040-6090(00)00873-7

Authors: A. Ahmed, R.B. Dunford, D.J. Paul, M. Pepper, A.C. Churchill, D.J. Robbins, A.J. Pidduck

Institution: University of Cambridge

Language: English

Topic: Semiconductor Quantum Structures and Devices

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2083825855

FWCI: 0.242

Cites: 15

Cited by: 3

Related to: 10