Work

Modeling, design, fabrication and characterization of a micro Coriolis mass flow sensor

Year: 2010

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/0960-1317/20/12/125001

Authors: J Haneveld, T S J Lammerink, M J de Boer, R G P Sanders, A Mehendale, J C Lötters, M Dijkstra, R J Wiegerink

Institutions: Bronkhorst (Netherlands), University of Twente

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2084297942

FWCI: 4.225

Cites: 11

Cited by: 86

Related to: 10