Work

A single-mask process for 3-D microstructure fabrication in glass and elastomers

Year: 2012

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2012.6170129

Authors: Y. Hosseini, P. Zellner, M. Agah

Institution: Virginia Tech

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2084639396

FWCI: 0.409

Cites: 7

Cited by: 1

Related to: 10