(Ba,Sr)TiO3 dielectrics for future stacked- capacitor DRAM
Year: 1999
Type: article
DOI: 10.1147/rd.433.0367
Authors: D. E. Kotecki, J. D. Baniecki, H. Shen, R. B. Laibowitz, K. L. Saenger, J. J. Lian, T. M. Shaw, S. D. Athavale, C. Cabral, P. R. Duncombe, M. Gutsche, G. Kunkel, Y.-J. Park, Y.-Y. Wang, R. Wise
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2085622273