Work

Depth distribution of B implanted in Si after excimer laser irradiation

Year: 2005

Type: article

Source: Applied Physics Letters

DOI: 10.1063/1.1856696

Authors: Giovanni Mannino, Vittorio Privitera, Antonino La Magna, Emanuele Rimini, Enrico Napolitani, Guglielmo Fortunato, Luigi Mariucci

Institutions: Institute for Microelectronics and Microsystems, University of Padua

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2086869330

FWCI: 2.867

Cites: 12

Cited by: 29

Related to: 10