Crystallization kinetics of amorphous Si/SiO2 superlattice structures
Year: 1988
Type: article
Authors: P.D. Persans, A. Ruppert, B. Abeles
Institutions: Rensselaer Polytechnic Institute, ExxonMobil (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2087407964