Year: 2005
Type: article
Abstract: A highly sensitive film bulk acoustic resonator (FBAR) mass sensor in liquid environments is described in this paper. A transmission line model is used to theoretically predict the dependence of the FBAR's resonant frequency on added mass. FBAR performance in a liquid environment is experimentally characterized for the first time and the effects of the liquid nature and conductivity on the FBAR series and parallel resonant frequencies are investigated. A TiO 2 -coated FBAR is developed for sensitive mass sensing of metal ions in a liquid environment.
Authors: Hao Zhang, Mong S Marma, Eun Sok Kim, Charles E McKenna, Mark E Thompson
Institution: University of Southern California
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
Funder: Office of Naval Research
Award: G8876996369
OpenAlex ID: W2087557482