Work

A multiscale systems approach to microelectronic processes

Year: 2006

Type: article

Source: Computers & Chemical Engineering

DOI: 10.1016/j.compchemeng.2006.05.022

Authors: Richard D. Braatz, Richard C. Alkire, Edmund G. Seebauer, Timothy O. Drews, Effendi Rusli, Mohan Karulkar, Feng Xue, Yan Qin, Michael Y.L. Jung, Rudiyanto Gunawan

Institution: University of Illinois Urbana-Champaign

Language: English

Topic: Simulation Techniques and Applications

Subfield: Management Science and Operations Research

Field: Decision Sciences

Domain: Social Sciences

Open Access status: closed

Funder: National Science Foundation

OpenAlex ID: W2087822883

FWCI: 2.892

Cites: 99

Cited by: 20

Related to: 10