Colloidal Lithographic Nanopatterning via Reactive Ion Etching
Year: 2004
Type: article
DOI: 10.1021/ja0319083
Institution: Korea Advanced Institute of Science and Technology
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2088565749