Work

Effects of the substrate on the determination of thin film mechanical properties by nanoindentation

Year: 2002

Type: article

Source: Acta Materialia

DOI: 10.1016/s1359-6454(01)00328-7

Authors: Ranjana Saha, William D. Nix

Institution: Stanford University

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: U.S. Department of Energy, Basic Energy Sciences

OpenAlex ID: W2089053378

FWCI: 53.97

Cites: 36

Cited by: 1,603

Related to: 10