Work

Entrance Effects In A Horizontal Atmospheric-Pressure MOCVD Reactor

Year: 1987

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.941012

Authors: E. S. Johnson, G. E. Legg, N. E. Schumaker

Institutions: Motorola (United States), Emcore (United States)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2089262075

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