Work

Aromatizing unzipping polyester for EUV photoresist

Year: 2015

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2085780

Authors: Kensuke Matsuzawa, Ryan Mesch, Mike Olah, Wade Wang, Scott T. Phillips, C. Grant Willson

Institutions: The University of Texas at Austin, Pennsylvania State University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Intel Corporation, National Institute of Standards and Technology

OpenAlex ID: W2089546557

FWCI: 0.826

Cites: 9

Cited by: 3

Related to: 10