Mathematical Modeling of Electrostatic MEMS with Tailored Dielectric Properties
Work
Year: 2002
Type: article
Author John A. Pelesko
Cites: 36
Cited by: 162
Related to: 10
FWCI: 3.383
Citation percentile (by year/subfield): 95.49
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Sustainable Development Goal Affordable and clean energy
Open Access status: closed