Work

MOEMS device design, development, and integration for interconnect applications

Year: 2003

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.477926

Authors: James Castracane, Bai Xu, Seth Madison, Jaap Verheggen, Dong Yan

Institution: University at Albany, State University of New York

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2090634658

FWCI: 0.432

Cites:

Cited by: 1

Related to: 10