Work

Simulation study on stress and deformation of polymeric patterns during the demolding process in thermal imprint lithography

Year: 2008

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.2890693

Authors: Zhichao Song, Junseo Choi, Byoung Hee You, Jaejong Lee, Sunggook Park

Institutions: Louisiana State University, Korea Institute of Machinery & Materials

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2090894317

FWCI: 2.652

Cites: 23

Cited by: 42

Related to: 10