Fabrication techniques for low-loss silicon nitride waveguides
Year: 2005
Type: conference-paper
DOI: 10.1117/12.588828
Authors: Michael J. Shaw, Junpeng Guo, Gregory A. Vawter, Scott Habermehl, Charles T. Sullivan
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2090911445