Work

In situ optical monitoring for SiGe epitaxy

Year: 2000

Type: article

Source: Journal of Crystal Growth

DOI: 10.1016/s0022-0248(99)00557-6

Authors: D.J Robbins, C Pickering, J Russell, R.T Carline, A.W Dann, A.D Marrs, J.L Glasper

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2091509023

FWCI: 0.337

Cites: 10

Cited by: 2

Related to: 10