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200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules

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Year: 2013
Type: conference-paper
Source: Technical digest - International Electron Devices Meeting/Technical digest
DOI: 10.1109/iedm.2013.6724627
Authors: C. Wang, S. W. Nam, J. M. Cotte, H. Peng, C. V. Jahnes, D. Wang, R. Bruce, M. Guillorn, L. M. Gignac, W. H. Advocate, C. M. Breslin, M. Brink, J. Bucchignano, E. A. Duch, A. Galan, E. Kratschmer, P. J. Litwinowicz, M. F. Lofaro, W. Price, S. M. Rossnagel, R. D. Goldblatt, E. A. Joseph, D. Pfeiffer, S. Papa Rao, A. Royyuru, G. A. Stolovitzky, E. G. Colgan, Q. Lin, S. Polonsky
Institutions: IBM (United States), IBM Research - Thomas J. Watson Research Center
Language: English

Topic: Microfluidic and Capillary Electrophoresis Applications
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: closed
OpenAlex ID: W2091858877
FWCI: 1.321
Cites: 6
Cited by: 4
Related to: 10
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