Work

Optimization of electromechanical coupling for a thin-film PZT membrane: II. Experiment

Year: 2005

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/0960-1317/15/10/003

Authors: J Cho, M Anderson, R Richards, D Bahr, C Richards

Institutions: Washington State University, University of Idaho

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W2091884384

FWCI: 9.219

Cites: 67

Cited by: 124

Related to: 10