Work

Anisotropic etching of silicon in TMAH solutions

Year: 1992

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/0924-4247(92)80139-t

Authors: Osamu Tabata, Ryouji Asahi, Hirofumi Funabashi, Keiichi Shimaoka, Susumu Sugiyama

Institution: Toyota Central Research and Development Laboratories (Japan)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2092346700

FWCI: 2.781

Cites: 15

Cited by: 479

Related to: 10