Work

Temperature-Dependent Thermal Conductivity of Single-Crystal Silicon Layers in SOI Substrates

Year: 1998

Type: article

Source: ASME Journal of Heat and Mass Transfer

DOI: 10.1115/1.2830059

Authors: M. Asheghi, M. N. Touzelbaev, K. E. Goodson, Y. K. Leung, S. S. Wong

Institution: Stanford University

Language: English

Topic: Thermal properties of materials

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Semiconductor Research Corporation, University of Dayton, Office of Naval Research

OpenAlex ID: W2092411913

FWCI: 4.409

Cites: 30

Cited by: 375

Related to: 9