Work

Streamlined cryogenic deep reactive ion etching protocol for hybrid micronozzle arrays

Year: 2011

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/0960-1317/21/10/105001

Authors: Ahmet Erten, Milan Makale, Xuekun Lu, Bernd Fruhberger, Santosh Kesari, Sadik Esener

Institutions: University of California San Diego, Moores Cancer Center

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: University of California, San Diego

OpenAlex ID: W2092730751

FWCI:

Cites: 33

Cited by: 1

Related to: 10