Piezoelectric thin films for mems
Year: 1997
Type: article
Abstract: A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applications. The application principles are explained and the piezoelectric coefficients are compared with the ones of AlN and ZnO. The Materials figure of merits are given for various applications and discussed. The coupling coefficient for ultrasonic applications is treated in more detail.
Source: Integrated ferroelectrics
Author: Paul Muralt
Institution: École Polytechnique Fédérale de Lausanne
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W2092872972