Work

The mechanical properties of polycrystalline 3C-SiC films grown on polysilicon substrates by atmospheric pressure chemical-vapor deposition

Year: 2006

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.2169875

Authors: Shuvo Roy, Christian Zorman, Mehran Mehregany, Russell DeAnna, Chris Deeb

Institutions: Case Western Reserve University, Glenn Research Center, National Aeronautics and Space Administration

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Cleveland Clinic, Case Western Reserve University, Multidisciplinary University Research Initiative, Army Research Office

OpenAlex ID: W2093373347

FWCI: 4.386

Cites: 17

Cited by: 42

Related to: 10