Work

PREDICT - A New Design Tool For Shallow Junction Processes

Year: 1985

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.946472

Authors: R. B. Fair, R. Subrahmanyan

Institutions: MCNC Research and Development Institute, Duke University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2093546314

FWCI: 2.414

Cites:

Cited by: 5

Related to: 10