Challenges to manufacturing submicron, ultra-large scale integrated circuits
Year: 1990
Type: article
Source: Proceedings of the IEEE
DOI: 10.1109/5.63298
Author: R.B. Fair
Institutions: Duke University, MCNC Research and Development Institute
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2093710318