Work

An improved focus control mirror using SU-8 wafer bonding process

Year: 2011

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.876672

Authors: Mohammad J. Moghimi, B. Jeffery Lutzenberger, Kyle Oliver, Steven Gates, Xiaohu Xue, Brant Kaylor, David L. Dickensheets

Institutions: Montana State University, Bridger Photonics (United States)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2094491084

FWCI: 0.867

Cites:

Cited by: 4

Related to: 10