Ion-beam sculpting at nanometre length scales
Year: 2001
Type: article
Source: Nature
DOI: 10.1038/35084037
Authors: Jiali Li, Derek Stein, Ciaran McMullan, Daniel Branton, Michael J. Aziz, Jene A. Golovchenko
Institution: Harvard University
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W2095898308