Work

Self-polarized capacitive silicon micromechanical resonators via charge trapping

Year: 2010

Type: conference-paper

Source: Technical digest - International Electron Devices Meeting/Technical digest

DOI: 10.1109/iedm.2010.5703316

Authors: Ashwin K. Samarao, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2095962946

FWCI: 2.945

Cites: 16

Cited by: 8

Related to: 10